专利内容由知识产权出版社提供
专利名称：Internal member of a plasma processing
vessel
发明人：Kouji Mitsuhashi,Hiroyuki
Nakayama,Nobuyuki Nagayama,TsuyoshiMoriya,Hiroshi Nagaike
申请号：US12838096申请日：20100716公开号：US08449715B2公开日：20130528
专利附图：
摘要：An internal member of a plasma processing vessel includes a base material and
a film formed by thermal spraying of ceramic on a surface of the base material. The film isformed of ceramic which includes at least one kind of element selected from the groupconsisting of B, Mg, Al, Si, Ca, Cr, Y, Zr, Ta, Ce and Nd. In addition, at least a portion of thefilm is sealed by a resin.
申请人：Kouji Mitsuhashi,Hiroyuki Nakayama,Nobuyuki Nagayama,TsuyoshiMoriya,Hiroshi Nagaike
地址：Nirasaki JP,Nirasaki JP,Nirasaki JP,Nirasaki JP,Nirasaki JP
国籍：JP,JP,JP,JP,JP
代理机构：Rothwell, Figg, Ernst & Manbeck, P.C.
更多信息请下载全文后查看
