专利内容由知识产权出版社提供
专利名称：Method for manufacturing ceramic
substrate
发明人：Chien-Hung Ho,Chen-Shen Kuo,Chun-Chu Wu申请号：US14808656申请日：20150724公开号：US09437549B2公开日：20160906
专利附图：
摘要：A method for manufacturing a ceramic substrate is characterized in using apreformed trench, a patterned protective layer and a sand blasting process to
manufacture a cavity in a ceramic substrate and control the cavity size and shape of the
ceramic substrate. The ceramic substrate is collocated with a base substrate to form apackage substrate for packaging a semiconductor chip. The manufacturing method setforth above can lower the manufacturing cost and raise the accuracy of the size andshape of the cavity of the ceramic substrate. The abovementioned method can reducethe fabrication cost and increase the precision of the shape and size of a ceramicsubstrate.
申请人：VIKING TECH CORPORATION
地址：Hsinchu County TW
国籍：TW
代理机构：Muncy, Geissler, Olds & Lowe, P.C.
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