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专利名称：PATTERN EDGE DETECTING METHOD AND
PATTERN EVALUATING METHOD
发明人：Tadashi MITSUI申请号：US125515申请日：20090922
公开号：US20100303361A1公开日：20101202
专利附图：
摘要：A pattern edge detecting method includes: detecting edge points in an imageof an inspection pattern acquired from an imaging device; generating a plurality of edgelines from the edge points using a grouping process; generating a plurality of edge line
group pairs, each composed of a combination of first and second edge line groups to bea candidate of any of one and the other of an outside edge and an inside edge of theinspection pattern, the generated edge lines being divided into two parts in differentmanners; performing shape matching between the first and second edge line groups foreach edge line group pair; and specifying, as an edge of the inspection pattern, one of thefirst and second edge line groups constituting the edge line group pair whose matchingscore is best of matching scores of the edge line group pairs obtained during the shapematching.
申请人：Tadashi MITSUI
地址：Kamakura-Shi JP
国籍：JP
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