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专利名称：HEAT TREATMENT APPARATUS, HEAT
TREATMENT METHOD, AND RECORDINGMEDIUM STORING COMPUTER PROGRAMCARRYING OUT THE SAME
发明人：Hikaru Ito,Shinji Okada,Masami Yamashita申请号：US127881申请日：20100527
公开号：US201002377A1公开日：20100923
专利附图：
摘要：An experiment is conducted in advance, for finding a temperature of a cooling
plate attained as a result of balancing between a temperature of a substrate after heattreatment and a temperature of the cooling plate at the time of cooling of the substrate.Then, before heat treatment of a first substrate, the cooling plate is moved to a positionabove a hot plate, the cooling plate is heated to that temperature, and thereafter heattreatment of the substrate is started.
申请人：Hikaru Ito,Shinji Okada,Masami Yamashita
地址：Minato-ku JP,Koshi-shi JP,Minato-ku JP
国籍：JP,JP,JP
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