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专利名称：Production of electronic coatings by spin
coating a partially fluorinated polyamic acidcomposition
发明人：Allan A. Eisenbraun,Wesley C. Blocker申请号：US07/255609申请日：19881011公开号：US04996254A公开日：19910226
摘要：In human atmospheres (e.g., 55% relative humidity or above) solutions of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride/2, 2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyamic acid polymers tend to be unstablein the sense that during spin coating operations undesirable precipitate formation mayoccur on the rotating surface of a semiconductor wafer. The result is the formation ofunacceptable coatings due to their irregularity and lack of uniformity. Described aresolutions of these polyamic acid polymers in a solvent containing one or more
cycloaliphatic ketones, such that the solution (a) contains on a weight basis from about5% to about 40% of the polyamic acid and (b) does not undergo precipitate formationduring spin coating in an atmosphere of up to at least about 55% relative humidity.
申请人：ETHYL CORPORATION
代理人：John F. Sieberth
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