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专利名称：DEVICE FOR STORING SUBSTRATES发明人：JAEGER, ERICH,BALG, CHRISTIAN申请号：CH2006000356申请日：20060706
公开号：WO2007006166A3公开日：20070329
摘要：The invention relates to a device for storing platelike substrates (8), particularlywafers or test wafers, like those, in particular, used for manufacturing electroniccomponents. The aim of the invention is to make a reliable access to the substrates (8)possible even when storage elements (1), which can be separated from one another, ofthe device are affected by manufacturing mistakes. For such a device that, for eachsubstrate (8), has a number of storage elements (1), which follow one another in adirection of stacking and which can move relative to one another, in which the storageelements (1) have a stacking area (2), which is provided for placing the respective storageelement (1)inside a stack (3) of storage elements (1), compensating means (5) aretherefore provided in order to compensate for stacking errors in the direction ofstacking.
申请人：TEC-SEM AG,JAEGER, ERICH,BALG, CHRISTIAN
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