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专利名称：Apparatus for measuring charged particle
beam
发明人：Don A. Gregory,Charles D. Stocks申请号：US06/342857申请日：19820126公开号：US04455532A公开日：19840619
摘要：The apparatus 11 according to the present invention effectively eliminateslosses to reflection and/or secondary emission of the charged particle beam 13 beingmeasured. It comprises a sense cup (17) with an interior chamber and an entry opening(25) through which the charged particle beam (13) enters. A sense cone (19) forms therear wall of the interior chamber with the cone apex adjacent the entry opening (25) . Anouter case (21) surrounds the sense cup (17) and is electrically insulated therefrom.Charged particles entering the interior chamber are trapped and are absorbed by thesense cup and cone and travel through a current measuring device (15) to ground.
申请人：THE UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOROF THE NATIONAL AERONAUTICS AND SPACE ADMINISTRATION
代理人：Joseph H. Beumer,John R. Manning,Leon D. Wofford, Jr.
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