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专利名称：METHOD OF FABRICATION OF THIN FILM
RESISTOR WITH 0 TCR
发明人：Jeffrey R. Amadon,Anil K.
Chinthakindi,Kenneth J. Stein,Kwong H.Wong
申请号：US10250075申请日：20030602
公开号：US20040239478A1公开日：20041202
专利附图：
摘要：A thin film resistor that has a substantially zero TCR is provided as well as a
method for fabricating the same. The thin film resistor includes at least two resistormaterials located over one another. Each resistor material has a different temperaturecoefficient of resistivity such that the effective temperature coefficient of resistivity of thethin film resistor is substantially 0 ppm/° C. The thin film resistor may be integrated into ainterconnect structure or it may be integrated with a metal-insulator-metal capacitor(MIMCAP).
申请人：INTERNATIONAL BUSINESS MACHINES CORPORATION
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