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专利名称：Method of fabrication of thin film resistor
with 0 TCR
发明人：Jeffrey R. Amadon,Anil K.
Chinthakindi,Kenneth J. Stein,Kwong H.Wong
申请号：US10250075申请日：20030602公开号：US07012499B2公开日：20060314
专利附图：
摘要：A thin film resistor that has a substantially zero TCR is provided as well as a
method for fabricating the same. The thin film resistor includes at least two resistormaterials located over one another. Each resistor material has a different temperaturecoefficient of resistivity such that the effective temperature coefficient of resistivity of thethin film resistor is substantially 0 ppm/° C. The thin film resistor may be integrated into ainterconnect structure or it may be integrated with a metal-insulator-metal capacitor(MIMCAP).
申请人：Jeffrey R. Amadon,Anil K. Chinthakindi,Kenneth J. Stein,Kwong H. Wong
地址：Poughkeepsie NY US,Fishkill NY US,Sandy Hook CT US,Wappingers Falls NY US
国籍：US,US,US,US
代理机构：Scully, Scott, Murphy & Presser
代理人：James J. Cioffi, Esq.
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