专利内容由知识产权出版社提供
专利名称：HIGH DEFINITION HEATER AND METHOD
OF OPERATION
发明人：Kevin Ptasienski,Kevin Robert Smith,Cal
Thomas Swanson,Philip StevenSchmidt,Mohammad Nosrati,JacobLindley,Allen Norman Boldt,SanhongZhang,Louis P. Steinhauser,Dennis StanleyGrimard
申请号：US14990109申请日：20160107
公开号：US20160118276A1公开日：20160428
专利附图：
摘要：An apparatus is provided, by way of example, a heater for use in semiconductorprocessing equipment, that includes a base functional layer having at least one functionalzone. A substrate is secured to the base functional layer, and a tuning layer is secured tothe substrate opposite the base functional layer. The tuning layer includes a plurality ofzones that is greater in number than the zones of the base functional layer, and thetuning layer has lower power than the base functional layer. Further, a component, suchas a chuck by way of example, is secured to the tuning layer opposite the substrate. Thesubstrate defines a thermal conductivity to dissipate a requisite amount of power fromthe base functional layer.
申请人：Watlow Electric Manufacturing Company
地址：St. Louis MO US
国籍：US
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