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专利名称：Measurement apparatus and measurement
method
发明人：Katsumi Fujihara,Hidetoshi Ohba申请号：US11790953申请日：20070430公开号：US07633602B2公开日：20091215
专利附图：
摘要：A measurement apparatus having a measurement light source for emittingmeasurement light, a projection unit on which reflected light formed when themeasurement light is reflected from the mirror plane is projected as a projected light
spot, an image pickup unit for picking up an image of the projection unit on which thereflected light is projected as the projected light spot, a control unit for controlling aninclination of the mirror plane and a measurement unit for measuring a quantity ofmovement of the projected light spot, which moves according to a change of theinclination of the mirror plane, on the basis of the image of the projection unit. Thisenables the measurement of a deflection characteristic of a mirror system having themirror plane variable to arrange the inclination within a short period of time and with highaccuracy.
申请人：Katsumi Fujihara,Hidetoshi Ohba
地址：Kanagawa JP,Kanagawa JP
国籍：JP,JP
代理机构：Westerman, Hattori, Daniels & Adrian, LLP
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