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专利名称：DEVICE AND METHOD FOR THE
CHARACTERIZATION OF THE SURFACE OFAN ASPHERIC DIFFRACTIVE STRUCTURE
发明人：SCOTT, Paul James申请号：EP10779030.5申请日：20101101公开号：EP2494306A1公开日：20120905
摘要：A method of characterising the surface of an aspheric diffractive structureincludes using a metrological apparatus to perform a measurement on the surface of thestructure so as to provide a measurement profile representing the z-direction deviationsof the surface of the structure; determining parameters relating to the aspheric anddiffractive components of the aspheric diffractive structure; producing data having thedetermined parameters; and comparing the produced data with the measurement profileto determine residual error data.
申请人：Taylor Hobson Limited
地址：2 New Star Road Leicester, Leicestershire LE4 9JQ GB
国籍：GB
代理机构：Clark, Jane Anne
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