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SENSOR DEVICE AND METHOD

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专利名称:SENSOR DEVICE AND METHOD

发明人:Klaus Elian,Georg Meyer-Berg,Horst Theuss申请号:US13733375申请日:20130103

公开号:US20130122660A1公开日:20130516

专利附图:

摘要:A sensor device and method. One embodiment provides a first semiconductorchip having a sensing region. A porous structure element is attached to the firstsemiconductor chip. A first region of the porous structure element faces the sensingregion of the first semiconductor chip. An encapsulation material partially encapsulates

the first semiconductor chip and the porous structure element.

申请人:Infineon Technologies AG

地址:Neubiberg DE

国籍:DE

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